supply and a dual-magnetron system (DMS)?
This is a really good question. When you are using planar magnetrons, they can be as close as 2.5 cm (1″) and as far as 1 m (3′). The key is that you need a good path for electron flow between the magnetrons. Nothing other than the darkspace shields should be in the way of the electron flow. If you are using planar magnetrons side by side (facing the same direction or even slightly tilted toward each other), you will need to “rotate the tires”—swap target faces or even rotate them on the same magnetron, because the racetrack that is closest to the other magnetron will wear very fast, which reduces the target utilization.
