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How is secondary ion mass spectroscopy (SIMS) used for surface analysis?

April 26, 2017analysis Ion mass Secondary Sims Spectroscopy Used

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How is secondary ion mass spectroscopy (SIMS) used for surface analysis?

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This method can be used for compound analysis of the top 10 nm of a surface in question. This technique uses an ion beam to sputter material from the top surface. The removed material is then drawn into a mass spectrometer and analyzed. SIMS is used for compound identification of an unknown surface/object and compound identification of an unknown contaminant.