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With pulsed DC, does the lack of sputtering during the voltage reversal affect my sputter rate?

April 26, 2017affect dc lack Pulsed rate reversal sputter sputtering voltage

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With pulsed DC, does the lack of sputtering during the voltage reversal affect my sputter rate?

1 Answer

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Only slightly. AE’s unique pulsed-DC topology allows for energy storage during the voltage reversal step. This energy is then released during the subsequent sputter step. In essence, the average power delivered is therefore equal to similar DC-sputtering processes.