Will I need to redesign my process if I switch from PMMA resist formulated in chlorobenzene to an equivalent formulated in anisole?
The viscosity of PMMA resists formulated in anisole is slightly lower than those formulated in chlorobenzene. Therefore you may need to use a slightly higher solids PMMA A resist to obtain the same film thickness. Please refer to the spin speed curves located in our PMMA & copolymer technical data sheet to select the appropriate product.
Related Questions
- Are there performance differences between PMMA resists formulated in chlorobenzene and those formulated in anisole?
- What is an equivalent validated process or an alternative method of compliance? And can I use it?
- Is there another type of stainless steel or a stainless process that will better resist rust?
