Will existing older HAMA DRM, DD and WX models of wafer mapping sensors continue to work in process tools?
From a functional standpoint, the older HAMA wafer mapping sensors will generally operate for years. A majority of the original HAMA sensor units placed in production in the 1990s are still in production today. However, from a performance standpoint, these wafer mapping sensors were not designed to detect dark and ultra-thin wafers that are commonly found in fabs today. Ultimately as these dark and thin wafers are introduced into process tools, the older sensors will need to be upgraded. EX-Q wafer mapping sensors are capable of detecting bright, dark and thin wafers.
Related Questions
- Will existing older HAMA DRM, DD and WX models of wafer mapping sensors continue to work in process tools?
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