Why not just install a UPS on the mains of a semiconductor tool?
The intent of SEMI F47 is to provide specifications for semiconductor processing equipment that will lead to improved selection criteria for subcomponents and improvements in equipment system design. While it is recognized that in certain extreme causes or for specific functions battery storage devices may be appropriate, it is not the intent of this standard to increase the size or use of battery storage devices provided with equipment. Focus on improvements in equipment component and system design should lead to a reduction or elimination in the use of battery storage devices to achieve equipment reliability during voltage sag events. The reason for this is that battery-based power conditioners, such as UPSs, require maintenance. The reliability of the UPS becomes dependent on the reliability of the maintenance program. If you have a question, feel free to use the contact us hot link at the bottom of this page.
