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Why is temperature stability of the etch process important?

April 26, 2017etch process stability temperature

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Why is temperature stability of the etch process important?

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• Etch is a chemical process and temperature is a catalyst that impacts the etch process. With stable temperature on the wafer, we have stable etch profiles and better control of polymer build-up. As temperature changes, the rate of etch can change outside the desired process specifications.