Why can the Reflected power be tuned to zero watts ?
If all attempts are made to reduce the Reflected power to zero (or close to zero) watts, then the impedance matching circuit element values may require tweaking. This is covered in the Application Notes listed below. Basically, the circuit may require additional series inductance (when used with 1″ magnetron cathodes) or additional fixed shunt capacitance (when used with long match>cathode cables). It may also be possible that there is harmonic energy (generated in the plasma discharge) traveling back towards the RF generator and being displayed as fundamental frequency reflected power. The fix for this condition is to install an extra length of 50 ohm coax cable in between the RF generator output (BNC female connector) and the BNC male pigtail connector (labeled Match input). Please download and review the PB3 Plasma Impedance Matching Problems & Solutions application note.
Related Questions
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