Which SEMs will the 4 positioner systems fit into?
Zyvex has worked with all of the major SEM and SEM/FIB manufacturers to offer systems on the broadest base as possible. There are systems or designs for almost all of the FEI, Hitachi, JEOL, and Zeiss SEMs and SEM/FIBs. There are a few conditions that may exempt the tool from probing. The SEM must be turbo pumped for all electrical applications. A FEG source SEM is required for sub-120nm transistor characterization. If you have any questions please contact us at sales@zyvex.com.
