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Which semiconductor processes benefit from heated pumping lines, and which critical parts should be heated?

April 26, 2017benefit critical heated Processes pumping Semiconductor

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Which semiconductor processes benefit from heated pumping lines, and which critical parts should be heated?

1 Answer

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LPCVD, TEOS and metal etch processes benefit from heated pumping lines. Heated valves generate fewer particles, and heated gauges that measure process pressures improve process repeatability. Click here to learn more about HPS Heated lines and traps.