Where does Zyvex fit in the Non-Visual Fault Localization Process Flow?
The Zyvex SEM nanoprober product line is integral in locating non-visual fails. Most commonly, a failing bit is identified using some larger scale method. The sample is then deprocessed to contact level (if it hasn’t been already) and put in the Zyvex system. The user probes six transistors in a reference bit and then six transistors in the failing bit. The data is analyzed and a problem is found that points to a pair of contacts in a specific transistor. The transistor is cross sectioned and then put in a TEM. The image of the fail is then used to solve the root problem. In many cases, customers stop after nanoprobing when the electrical signature corresponds to previously seen fails. This greatly improves throughput and cycle time. The system can also be used at higher levels when fails are suspected in the metal levels or when other tools are unable to resolve a single bit fail. This can keep a user from deprocessing past a unique fail.
