Where do the dirt, lubricants, soaps and other surface deposits end up, once they have been removed from the surface in plasma?
A10: Dirty deposits and oxides layers break under the ion bombardment in the plasma chamber or burn at high temperature. The ashes (carbon) are deposited on the bottom of the chamber or in the vacuum pump filters. Volatile components of the residues evaporate into the process gas and are filtered out through the exhaust pipe. The flow from the exhaust pipe is smaller than the exhaust generated from a car. Soaps, lubricants and other contamination are removed from the surface during pre-cleaning.
