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Where can the process parameters for RC extraction tools be found?

April 26, 2017extraction parameters process RC tools

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Where can the process parameters for RC extraction tools be found?

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Process parameters for RC extraction can be found on UMC’s website. Simply login into the TDS account and go to Design Rule/Document Type Category. Parameters (e.g. ILD, IMD, thickness, dielectrics, min width and min spacing for each layer) can be found at categories: “Electrical Design Rule”, “Interconnect Capacitance Model” and “Topological Layout Rule”.