What rate can I expect from a dual-magnetron system and AC supply compared to a DC supply and one magnetron?
If we say that DC is always on and therefore we will get 100% rate of deposition, then an AC supply with a DMS will have about 80 to 85% of this because it crosses zero when it changes sputtering magnetrons. Due to the constantly changing AC signal, it cannot give a consistent signal to the magnetrons for sputtering. When it nears zero, the sputtering decreases, and when it actually hits zero, sputtering ceases. The other magnetron must re-light the fire, so there is a lag in current here.
