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What performance improvement does a guarded chuck provide?

April 26, 2017Chuck guarded improvement PERFORMANCE

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What performance improvement does a guarded chuck provide?

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Even when taking measurements using probes placed on the top of the wafer, chuck guarding plays an important role in determining measurement performance. A low-leakage and low-noise triaxial chuck is essential for measuring device currents as low as 1 fA. For complete information on the beneficial effects of chuck guarding see the Cascade Microtech Technical Briefs: The Importance of Chuck Guarding in Top of Wafer Measurements and Reducing Measurement Noise In Thermal Wafer Probing Systems.