What is undercutting?
This phenomenon usually takes place at the interface of the mask edge and the part surface nearest to the processing area. The surface appears to be an edge due to the presence of the non-conductive mask. The ions concentrate here and cause a high rate of erosion in this region. It can be avoided by use of metallic masks (sacrificial or of tantalum, platinum etc.) or by tapering the mask where it comes in contact with the part surface.