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What is the structure of the 300-1D, 300-2D, 700-1D and 700-2D calibration specimens?

April 26, 2017calibration specimens structure

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What is the structure of the 300-1D, 300-2D, 700-1D and 700-2D calibration specimens?

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These calibration specimens are fabricated using a silicon wafer substrate which is overcoated with a polymer material. A precision, laser-generated, interference pattern is recorded in this material and then overcoated with about 50 nm of tungsten. This provides a reasonably durable coating and an electrically conductive path to ground. The (-1D) specimen pattern consists of ridges and the (-2D) specimen pattern consists of posts.