What is the SiN sharpened wedge tip mainly used for?
This tip is recommended as a probe for the inspection procedure of the products that have surface roughness smaller than 200 nm. For measuring polycrystalline silicon film that is used in semiconductor IC, hard and sharp tip is required for stable measurement. Needs for the low wear tip must increase because many customers would like to use AFM as a tool for the inspection of the products and expect reliable inspection system. • I understand that Si3N4 film is hard material in the graph above, but is there any data of long tip lifetime? Variation of the line scan profiles with Si3N4 tip and Silicon tip are shown below. The line profiles are the first and tenth images after repeating the measurement (repeating engage procedures) of rugged titanium film and silicon made mesh-pattern sample. Although a series of acceleration tests had been done, each condition on the servo feedback is optimized as well as normal AFM measurement when the line profile data (images below) were taken. After t
