What is the shot pitch I need to use?
Normally, you would use the minimum shot pitch allowed by the system. If your pattern spans across more than one sub-field, make sure that the shot pitch you select is a divisor of the sub-field size (4um by default). If your pattern spans over more than one field, make sure that the shot pitch is also a divisor of the field size (500um by default). Click here for a program to calculate the minimum shot pitch.