What is the recommended process for curing my specific polyimide?
The process is easy with the right equipment. First lets define a polyimide… Polyimides are high temperature engineering polymers utilized by semiconductor manufacturers for their excellent mechanical, thermal and electrical properties. Polyimides are usually applied in liquid form and then soft-baked to set the film. After the polyimide has been imaged and developed, it is ready to be thermally cured. The cure cycle activates the desired properties of the polyimide. While temperatures may change depending on the particular polyimide, the techniques developed to achieve an ideal film are universal. Now, let me go into detail on what the curing process for polyimide is doing. First, the polyimide needs to be cured in an oxygen-free environment. During the cure process oxygen will interfere with the cross- linking of the polyimide and result in a weak film. Our YES-450PB Series of tools first purge oxygen from the system through a series of vacuum pumpdowns and nitrogen backfills. Then
