What is the MBX Engine current density capability?
MBX Engine e-beams are produced by hot Schottky sources (one per beam) and then limited through apertures and focused using patented optics, resulting in >500A/cm2 shaped beams or >2000A/cm2 Gaussian beams at the substrate (wafer or photomask). This is a large advantage over other e-beam systems that are limited to much lower current densities (typically 10 to 200A/cm2). Combined with Multibeams writing strategy and distributed column architecture, this high current density results in short flash times, quickly patterning resist with minimal heating of the substrate.
