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What is the difference in utilization between planar and rotatable targets?

April 26, 2017planar rotatable targets utilization

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What is the difference in utilization between planar and rotatable targets?

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You typically get about 35% utilization out of a planar target and about 85% out of a rotatable. These numbers are independent of the process power method or target material you are using. Please note, however, that rotatable cathodes are not compatible with RF power. Generally, they are best used in AC, DC, or pulsed-DC powered processes.