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What is the difference between surface flatness and surface oughness?

April 26, 2017flatness roughness

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10 Posted

What is the difference between surface flatness and surface
oughness?

1 Answer

0

10 Posted

Surface ‘flatness’ is typically measured from an imaginary plane across the center of the wafer. Data points are then taken from that imaginary plane to the top surface of the wafer. The specification is given as GTIR (Global Total Indicated Readout) which covers multiple data points across the wafer.