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What is the difference between main etch temperature drift and wafer to wafer temperature stability?

April 26, 2017difference drift etch main stability temperature wafer

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What is the difference between main etch temperature drift and wafer to wafer temperature stability?

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• Both main etch temperature drift and wafer to wafer temperature drift are not desirable and can result in an unacceptable temperature-induced profile. Temperature drift within a batch of 1, 10 or 30 “boats” describes wafer-to-wafer drift.