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What is the capacitance variation across an 8″ wafer using a Summit AttoguardTM shielded station?

April 26, 2017capacitance shielded station Summit variation wafer

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What is the capacitance variation across an 8″ wafer using a Summit AttoguardTM shielded station?

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The capacitance variation is specified at 3 femtoFarad. For more information on the CV and IV advantages of the Cascade AttoguardTM system see the Cascade Microtech Technical Brief: Improved CV and IV Thermal Measurement Capabilities Using the Patented AttoGuard.