What is PMGI?
PMGI is an alkaline soluble polymer derived from PMMA. It is formulated for spin coating in a solvent primarily composed of cyclopentanone, for use as a photoresist in multilayer lithography when an undercut layer is needed, as in liftoff applications. It is used to create the retrograde profile, which provides a clean liftoff with no tearing, ripping or shredding of the deposited film. PMGI has an actinic spectral response at wavelengths from 240nm to 290nm.