What is lithography? What is Extreme Ultra Violet lithography?
Lithography is the process in which circuits—the pathways through which electrical current flows—are printed on silicon wafers. The current production light source wave length is 193 nanometers, which is used to print feature sizes of about 65 nanometers on silicon wafers. Extreme Ultra Violet (EUV) lithography is a future generation lithography technology and is expected to allow semiconductor manufacturers to print ever-smaller features on a wafer. EUV refers to a light source with a wave length below 19.3 nanometers. Intel engineers, in collaboration with others are working towards a complete EUV process, including equipment, process technology and materials, for possible use in making semiconductor devices with feature sizes of 22 nanometers and below.
