What is CMOS MEMS?
Akustica’s patented CMOS (complementary metal oxide semiconductor) MEMS (microelectromechanical systems) technology integrates the mechanical functionality of microphones and other sensors with analog and digital electronics all in a single chip. As a result, the sensory silicon products made using CMOS MEMS technology deliver superior performance and numerous product and manufacturing advantages. Breakthrough in CMOS Unlike other MEMS manufacturing technologies, CMOS MEMS employs standard CMOS (complementary metal oxide semiconductor) processes to fabricate microstructures within the metal-dielectric layers that are deposited during the standard CMOS processing flow, resulting in mechanical structures that are just microns away from the analog and digital electronics. A diagram of a typical CMOS MEMS process is below: CMOS MEMS is unique in that it is the only available MEMS process that is not just CMOS compatible, but is actually just CMOS. Manufacturing entirely in standard CMOS al
