What is a photoresist ink and how is it used in the semiconductor industry?
Photoresist inks are formulated with photosensitive polymers that are coated onto a silicon wafer. Typical positive photoresist ink would contain the following ingredients: Positive Photoresist 1 • Diazonaphthoquinone (photoactive compound) • Novolac resin • Stabilizer • Polymerization inhibitors • Viscosity control agent • Dyes • Plasticizers • Solvents (Eastman EastaPure&trade MAK, Eastman EastaPure&trade PM Acetate, Eastman EastaPure&trade n-Butyl Acetate, and EASTMAN&trade EEP solvents have been used in photoresist ink formulations). 1 Information from SRI International “Electronic Chemicals” 1992 The photoresist inks after being coated onto the silicone wafer is dried and exposed to ultra violet light by a process called photolithography. This process allows pattern pathways to be developed for the microelectronic integrated circuits. Eastman provides high purity solvents called Eastman EastaPure&trade Electronic Chemicals for producing uniform coatings on the silicone wafers.
