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What gases have special MFC requirements?

April 26, 2017gases MFC requirements special

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What gases have special MFC requirements?

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Many gases used in semi-conductor, analytical and chemistry applications are extremely sensitive to moisture and pressure variations. Subsequent reaction often results in creation of highly corrosive product, particle contamination or phase shift from the gas to liquid. These phenomena obstruct MFC sensors and other components of gas system. Section Gases with special MFC requirements presents some of the most common problems encountered.