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What full-scale flow ranges are available for the mass flow controllers in the Gas Metering unit?

April 26, 2017controllers flow full-scale Gas mass Metering ranges

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What full-scale flow ranges are available for the mass flow controllers in the Gas Metering unit?

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The range and gas for each mass flow controller is specified by the client at the time of order. The full-scale can be chosen as any value between 5 sccm and 100 slpm rated in nitrogen.