What are the requirements for metal fill for CMP (chemical mechanical polishing), and how do I incorporate these features into my design?
See MOSIS CMP and Antenna Rules. 7.1 What if my design doesn’t meet the CMP requirements? Will MOSIS fill it? If a design contains layers which do not meet density requirements for chemical mechanical polishing (CMP), then other designs on the reticle must make up for the deficit, or there must be enough blank area between designs to permit MOSIS to add sufficient fill. If layer density requirements cannot be met by these means, then MOSIS may exclude layout that does not meet the requirements. Please note that MOSIS cannot waive the metal filling rules. When CMP-related density requirements were first imposed by our fabrication vendors, many design environments did not support easy insertion of “fill” structures. To facilitate the transition to processes constrained by CMP, MOSIS started adding this fill to customer designs whenever a design failed to meet the density requirements. Although adding fill is relatively straightforward for simpler digital designs, the placement of fill el
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