What are the differences between Atomic Force Probing and SEM based Nanoprobing?
The key difference between these two techniques is how the sample is imaged. SEM based Nanoprobing uses the SEM as the imaging tool and the probe tips as the contact points. With Atomic Force Probing (AFP) the sample is imaged using the AFM probe tips which are also used to probe the device. This leads to slower image acquisition times and possible mechanical damage to the device. The image quality is also affected by the tip quality and so image quality degrades as the tips are used to probe the devices. As the image quality degrades it becomes harder to probe and thus more force is needed and the tip quality further degrades. There is also no real time image for user feedback so the user can not quickly reposition tips to achieve the best possible contact. Zyvex Instruments prefers the decoupled nature of SEM based Nanoprobing.
