What are the advantages of SUNALE™ ALD process tools?
The main advantage of our products is the ability to produce extremely uniform high quality thin films with short cycle times and good repeatability. Other advantages include ease of use, quick maintenance and highly reliable operation. We also offer broad range of reaction chambers, precursor sources and substrate loaders to choose from. SUNALE™ ALD process tools are designed and assembled with years of experience in ALD equipment. All in all, we are talking about supreme quality at reasonable price.