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Is there a SEMI standard for measuring equipment failure, downtime, and performance?

April 26, 2017downtime equipment failure measuring PERFORMANCE semi standard

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Is there a SEMI standard for measuring equipment failure, downtime, and performance?

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SEMI E10 – Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) This document establishes a common basis for communication between users and suppliers of semiconductor manufacturing equipment by providing standards for measuring RAM performance of that equipment in a manufacturing environment. It defines six basic equipment states into which all equipment conditions and periods of time must fall.