Is there a SEMI Standard carrier for 200 mm wafers?
In 1994, SEMI E1.7, Specification for a 200 mm Plastic and Metal Wafer Carriers was published as a Proposed Standard. Due to the nature of a proposed standard, this standard was removed from publication in 1996, two years after its initial publication. The standards work on an official 200 mm carrier stalled and eventually was discontinued, due to a lack of consensus on the few last details of the carrier, the number of product currently on the market at the time that would be “obsoleted” by the standard, and a shift in effort towards 300mm carriers. In 2009, SEMI E1 (Specification for Open Plastic and Metal Wafer Carriers) was rewritten to include dimensions for all of the carriers standardized from 3 inch to 150 mm. These dimensions were previously published as SEMI E1.1 through E1.5. There has been no change in these dimensions. SEMI E1 also includes, as Related Information (not as a Specification), dimensions from the E1.7 Proposed Standard. This information is added for historical
