Is there a reason for an equipment manufacturer to invest in third party tool testing other than to satisfy a customer requirement?
Yes. When implementing 300mm automation requirements, the issue facing the tool supplier is not whether they have incorporated the applicable SEMI standards, but if the implementation of those standards is in synchronization with each customers unique vision for automation. By analogy, when an architect designs a new home for a customer, the plans are incomplete if he only notes: Build in accordance with all applicable plumbing and electrical codes. Instead, he must include specifications and details enabling the contractor to properly locate fixtures with the appropriate fittings and finish requested by the customer. With the advent of the SEMATECH Test Methodology and Operational Scenarios, the semiconductor equipment manufacturer has been given a yardstick that establishes a baseline for automation capabilities and maturity. These operational scenarios represent the concurrent view of the SEMATECH member companies regarding a minimum set of core automation functionalities. An equipm
