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How will the S200 or sProber interface to the SEM?

April 26, 2017interface s200 SEM sprober

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10 Posted

How will the S200 or sProber interface to the SEM?

1 Answer

0

10 Posted

The system will mount directly on the SEM stage. Depending on the SEM there may be some loss of tilt, rotation, or Z movement while the head is installed but the majority of the SEM stages will not be affected by the Zyvex system. With the head removed, full functionality of the SEM is restored.