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How to etch tantalum pentoxide without etching silicon dioxide?

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How to etch tantalum pentoxide without etching silicon dioxide?

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+++ I have tantalum pentoxide coated on silicon dioxide which is on p type silicon. I want to etch only Tantalum pentoxide with out etching the silicon dioxide. Is there any way to do this. P.N.V.Anil Kumar Indian Institute of Technology Madras – Chennai, TamilNadu, India +++ Dear Sir/Madam, I would like to read the answer/s for above question.

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+++ I have tantalum pentoxide coated on silicon dioxide which is on p type silicon. I want to etch only Tantalum pentoxide with out etching the silicon dioxide. Is there any way to do this. P.N.V.Anil Kumar Indian Institute of Technology Madras – Chennai, TamilNadu, India +++ Dear Sir/Madam, I would like to read the answer/s for above question. Thanks, Uzi Maishar Smart Cards – Jerusalem, Israel Answer or follow-up on this subject (in non-commercial fashion). My company is a supporting advertiser at finishing.com and we want the contact information to reach the inquirer privately. Post a new question or inquiry on a different subject.

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