How should I calibrate the reflectometer to my chamber?
Here is a step-by-step reflectance calibration procedure which should work for most users. 1) Adjust the position and tilt of the optical head and the tilt of the wafer to achieve an image of the LEDs in the video monitor. 2) Rotate the substrate to change the wafer tilt, or tilt the instrument slightly such that the LEDs are not visible in the video monitor. This case represents zero reflectance. 3) Calibrate the reflectometer instrument by right-clicking in the Reflectance window and select “calibrate low” from the menu. Enter 0 for both the 470 and 950 nm reflectance values in the “Low” row. Click the “OK” button to dismiss the dialog box. 4) Restore the LED reflection again by returning the tilt back to its previous value. If you use substrate rotation, ensure the substrate is rotating and the “wobble filter” is on when performing this step. With the LED reflections centered in the video image, right-click in the Reflectance window and select “calibrate high” from the pop-up menu.
