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How is PMGI and LOR used?

April 26, 2017lor pmgi Used

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How is PMGI and LOR used?

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There are different ways to use PMGI. It may be used as the bottom layer of a 2 layer system or also between other layers in a trilayer system. After the top imaging resist is exposed and developed, additional development removes the PMGI directly beneath the new imaging resist window and also develops PMGI laterally. This lateral undercutting of the top imaging resist leaves an overhang feature in the imaging resist.