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How is energy dispersive spectroscopy (EDS or EDX) used for surface analysis?

April 26, 2017analysis dispersive EDS edx energy Spectroscopy Used

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How is energy dispersive spectroscopy (EDS or EDX) used for surface analysis?

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This method is used to determine the elemental composition of a surface in question. This technique uses a beam of electrons to produce X-rays from the examined surface. The energy of each X-ray photon is characteristic of the element, which produced it. This test is usually performed in conjunction in SEM imaging. EDS is used for elemental identification of an unknown surface/object and elemental identification of an unknown contaminant.