How fast is the Multibeam MBX Engine?
Since Multibeam achieves high current density and high edge acuity in each shaped beam using its patented optics, each pattern can be exposed in a matter of tens of nanoseconds. This, combined with the high-speed electronics controlling Multibeams all-electrostatic column, enables the MBX Engine to write each pattern sequentially with cycle times in the tens of nanoseconds. Throughput depends on application. A Multibeam MEBIC has a throughput of 5 wafers per hour which is compatible with process flows in low-volume ASIC foundries.
