How does the SEM beam affect transistor characteristics?
It is widely accepted that high energy E-beams will affect transistor characteristics. Zyvex is constantly researching this area and working with the SEM manufacturers to stay ahead of the semiconductor community. Zyvex has a standard procedure to evaluate transistor degradation under a beam of certain energies and sample currents. Zyvex is currently working well below the threshold needed by the industry today. Because each chip manufacturer is different, Zyvex normally runs these experiments for customers during the demo of the tool. For more detailed information please contact us at sales@zyvex.com.
