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How does HMDS bond to a wafer surface?

Bond hmds wafer
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How does HMDS bond to a wafer surface?

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Hexamethyldisilizane (HMDS) {NH-2Si(CH3)3} removes the H on the end of a Hydroxyl ion, removing 2 Hs breaks down the NH bond of the HMDS. This liberates NH3 (ammonia), and leaves Silicon tri-methyl attached to the {2} old hydroxyl bonds.

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