How do the different erosion patterns of planar and rotatable targets affect the process over the course of the target’s lifetime?
Although planar and rotatable targets do erode differently, there is actually little difference in how you should handle your process power over the course of the target’s lifetime. For rotatables, target thickness decreases in a uniform manner, causing the magnets to move closer to the target surface. This results in an increase in current and a decrease in voltage. Although planar targets erode in a non-uniform manner, you will see a decrease in current and an increase in voltage.
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- How do the different erosion patterns of planar and rotatable targets affect the process over the course of the target’s lifetime?
