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How do I determine the resolution of an AS-9000, AS-5000 or AS-1500 capacitance sensor?

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How do I determine the resolution of an AS-9000, AS-5000 or AS-1500 capacitance sensor?

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To determine the resolution of a capacitance system you will need to know the noise of amplifier and the sensitivity of the probe that you would like use. Resolution = Noise X Sensitivity. Example: AS-5000 with a 500Hz frequency response filter ASP-2-ILA probe. Range of probe is 0.002 in (50.8 um) AS-9000 and AS-5000 Sensitivity of the ASP-2-ILA is Range/Full Scale Voltage Sens.= 2 mils/10V = 0.2mils/V = 0.2uin/mV Noise of the AS-5000 with a 500Hz filter is 1.0mV. Resolution = Sensitivity*Noise = Sensitivity*Noise = (0.20 uin/mV)*(1.0mV) = (0.0051um/mV)*(1.0mV) = 0.20 uin = 0.

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