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How do FastGate measurements correlate with conventional hardprobe CV?

April 26, 2017conventional correlate CV fastgate measurements

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How do FastGate measurements correlate with conventional hardprobe CV?

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For thicker oxides, FastGate measurements agree well with conventional hard probe CV measurements. For thin oxides, the much smaller diameter EM-gate is much less sensitive to the equivalent circuit effects that plague conventional CV and so produces better results..