How can I defeat edge bead or cobwebbing?
Both of these problems can be overcome by using MCC’s edge bead remover product EBR PG. It should be noted that acetone is not compatible with PMGI and LOR and will not remove edge bead. EBR PG is a universal formulation and will also remove other conventional resists and anti reflective coating materials. This permits a single edge bead remover to be used for many materials.
