Can PFC emissions from semiconductor manufacturing be reduced?
Yes, PFC emissions from semiconductor manufacturing can and are being reduced. EPA’s partners are implementing a variety of emission reduction strategies such as optimizing (i.e., fine tuning) their production processes to use and emit less PFC gas and switching to use alternative input gases, for example NF3, which are utilized more efficiently in the process thereby emitting much less PFC into the exhaust stream. The partners’ individual PFC emission reduction strategies vary greatly depending on the companies’ product and equipment mix as well as future business plans.
